Canon Inc., 20-2, Kiyohara-Kogyodanchi, Utsunomiya-shi, Tochigi 321-3292 Japan … lithography (NIL) manufacturing equipment utilizes a patterning technology that … model that is very compelling for semiconductor memory applications. … B. J. Choi, J. G. Ekerdt, S. V. Sreenivasan, Solid State Technology, 67, June 2001.
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