2Institute of Semiconductor and Electronics Technologies, ULVAC, Inc., Suyama, … devices.1 On the other hand, HfO2-based memory technologies … 3E. Lim and R. Ismail, Electronics 4, 586 (2015). 4J. Müller, P. Polakowski, S. Mueller, and … M. Buehler, A. Cappellani, R. Chau et al., in IEEE International Electron Devices.
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