category 3 – BIS

semiconductor lithography specially adjusted. (optimized) for use at wavelengths between. 370 and 193 nm. License Requirements. Reason for Control: AT.

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Security Lithography

technology can be used to embed a unique ID into each IC during wafer fabrication. Needless to say, security is a major concern in the semiconductor industry.

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aaaster – OSTI.gov

Whereas only a few US semiconductor companies, working individually, have stu- died synchrotron radiation lithography, there exist highly co-ordinated and …

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