Chemical Society, 2016, ACS, Applied Materials & Interfaces, 8, pp.31375. … etching (MACE) of p-type c-Si in HF/H2O2 aqueous solutions using Pt nanoparticles as catalysts is presented. … modeling of the metal/semiconductor/electrolyte interfaces … Ag and Pt. The etch rate increases in the following order: Ag <. Au < Pt.
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